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High Performance Matched-Mode Tuning Fork Gyroscope

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3 Author(s)
Zaman, M.F. ; Integrated MEMS Laboratory, Georgia Institute of Technology, Atlanta, Georgia, USA ; Sharma, A. ; Ayazi, F.

This paper presents the perfect matched-mode operation of a type I non-degenerate z-axis tuning-fork gyroscope (i.e., 0 Hz frequency split between high-Q drive and sense modes). The matched-mode tuning fork gyroscope (M2-TFG) is fabricated on 50-µ m thick SOI substrate and displays an overall rate sensitivity of 24.2 mV/º/s. Allan Variance analysis of the mode-matched device demonstrates an angle random walk (ARW) of 0.045 º/√ hr and a measured bias instability of 0.96 º/hr. Temperature characterization of the M2-TFG verifies that mode matching is maintained over a temperature range of 20-100 ° C.

Published in:

Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on

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