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Dual-Axis Electromagnetic Scanning Micromirror Using Radial Magnetic Field

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7 Author(s)
Chang-Hyeon Ji ; LG Electronics Institute of Technology ; Si-Hong Ahn ; Ki-Chang Song ; Hyoung-Kil Yoon
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This paper presents the design, fabrication and measurement results of a dual-axis electromagnetic scanning micromirror utilizing radial magnetic field. The scanner is comprised of a gimbaled single-crystal-silicon micromirror with a single turn electroplated metal coil, assembled passively above a concentric permanent magnet assembly. Proposed scanner utilizes the radial magnetic field rather than using the magnetic field oriented 45 ° to the horizontal and vertical scan axes to achieve a biaxial magnetic actuation[ 1,2]. Forced actuation of the gimbal and resonant actuation of the micromirror provide slow vertical scan and fast horizontal scan respectively. A dual-axis scanner with maximum scan angle of 16.1 °, mirror size of 1.5 mm in diameter, and resonant frequency of 19.7kHz is reported.

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Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on

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