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Nanotechnology: An Overview and Integration with MEMS

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4 Author(s)
Meyyappan, M. ; Center for Nanotechnology, NASA Ames Research Center, Moffett Field, CA 94035 ; Jing Li ; Jun Li ; Cassell, A.

There are strong research programs in nanotechnology related to chemical sensors, electromechanical devices, actuators, biosensors, etc. in leading laboratories across the world. In many cases, practical systems demand seamless integration of the nanodevice with higher order structures, for example, MEMS. Examples of this using carbon nanotube based chemical and biosensors are presented.

Published in:

Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on

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