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A research on high-Q micromechanical resonator fabricating process and micro-check

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4 Author(s)
Shusong Peng ; Sch. of Mechatronics Eng., Electron. Sci. & Technol. Univ., Chengdu, China ; Dagui Huang ; Zheng Dong ; Min Chen

The quality factors of single crystal silicon and polysilicon material approach quartz, but the dimensions of micromechanical resonator made of them are smaller than SAW resonator made of quartz. The paper states the fabricating process and micro dimensions check of clamped-clamped beam resonator, which has a high quality. Furthermore, two resonator micromechanical bandpass filters comprised by it have been demonstrated with frequencies up to 35MHz, percent bandwidths on the order of 0.2%, and insertion losses less than 2 dB.

Published in:

IEEE International Conference Mechatronics and Automation, 2005  (Volume:4 )

Date of Conference:

2005