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Input signal feedthrough in a high-speed track-and-hold (T/H) circuit often degrades the performance of analogue-to-digital data converters. A 10 GSamples/s CMOS T/H circuit with input feedthrough cancellation is proposed. This T/H circuit has been fabricated in 0.18 μm CMOS process. It achieves 5-bit resolution in 2.5 GHz analogue input signal at 10 GSamples/s.