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Fabrication of polymeric optical waveguides by B-staged bisbenzocyclobutene (BCB)

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4 Author(s)
Shee Yu Gang ; Fac. of Electr. Eng., Univ. Teknologi Malaysia, Johor, Malaysia ; Kassim, N.M. ; Mohammad, A.B. ; Ibrahim, M.H.

This paper reports the fabrication of polymeric optical waveguides. Single mode planar slab waveguides and straight waveguides had been fabricated from the organic polymer B-staged bisbenzocyclobutene (BCB) from DOW Chemical. A low cost fabrication method, chemical etching is used to form the waveguides on BK7 glass substrates. The processing conditions required for the fabrication of single mode optical waveguides are presented.

Published in:

Semiconductor Electronics, 2004. ICSE 2004. IEEE International Conference on

Date of Conference:

7-9 Dec. 2004