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Suspension design analysis on the performance of MEMS area-changed lateral capacitive accelerometer

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2 Author(s)
Bais, B. ; Inst. of Microengineering & Nanoelectronics, Univ. Kebangsaan Malaysia, Selangor, Malaysia ; Majlis, B.Y.

In this paper, variations of folded beam suspension design are analyzed and simulated in order to study its effect on the performance of an area-changed MEMS lateral capacitive accelerometer. The simulation was carried out using Coventorware2003. Mechanical issues like spring constants, stress distributions, cross-axis sensitivities and shock survivability are discussed.

Published in:

Semiconductor Electronics, 2004. ICSE 2004. IEEE International Conference on

Date of Conference:

7-9 Dec. 2004