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MEMS on/off and 1×2 optical switch with integrated fiber alignment capability

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2 Author(s)
Cheah Wei Leow ; Fakulti Kejuruteraan Elektrik, Univ. Teknologi Malaysia, Johor, Malaysia ; Mohammad, A.B.

An on/off free space optical switch is described in this paper. The device consists of intersecting cantilevers and is electrostatically actuated. A fiber is put onto the cantilevers and by controlling the position of the fiber through actuation, switching operation can be achieved. The device is also suitable for in-package fiber alignment application, where the cantilevers can be used as passive or active fiber alignment microstructure.

Published in:

Semiconductor Electronics, 2004. ICSE 2004. IEEE International Conference on

Date of Conference:

7-9 Dec. 2004