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Improvement of emission characteristics uniformity on CNT-FED by surface treatment

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6 Author(s)
Shiroishi, Tetsuya ; Adv. Technol. R&D Center, Mitsubishi Electr. Corp., Hyogo, Japan ; Kunihiko, N. ; Hosono, Akihiko ; Suzuki, Y.
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Two methods for improving the uniformity of the emission characteristics of carbon nanotube field emission display are presented. The first method is done by homogenization of CNT raisings through modification of the irradiation pattern that consisted of an array of small areas. In the second method, the impurities of CNT raisings are cleaned by second irradiation of which fluence was lower than that of first irradiation.

Published in:

Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International

Date of Conference:

10-14 July 2005

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