Field electron emission from carbon nanotubes coated on TiSi/sub 2/ buffer layer

Carbon nanotubes (CNTs) are grown with a catalysts of NiB/Al/sub 2/O/sub 3/ using a tube furnace. A 30 nm-thick TiSi/sub 2/ layer is grown on a mirror-polished n-type Si(001) wafer in the DC magnetron sputtering chamber. CNTs are dispersed into ZEP 150 photoresist mixed with hexamethyldisilizane (HMDS) and coated on different substrates by spin coating method. CNTs density of 10/sup 8/ cm/sup -2/ are obtained on the surface of various substrates. Field emission experiments are performed at a pressure of 10/sup -8/ Torr at 100 /spl mu/m distance between the substrate and a movable anode probe. The measured emission area is about 1 mm/sup 2/. Emission characteristics are discussed and explained with the inter field emission model.