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Magnetic induction machines integrated into bulk-micromachined silicon

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6 Author(s)
D. P. Arnold ; Georgia Inst. of Technol., Atlanta, GA, USA ; S. Das ; F. Cros ; I. Zana
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This paper presents the design, fabrication, and characterization of laminated, magnetic induction machines intended for high-speed, high-temperature, high-power-density, silicon-based microengine power generation systems. Innovative fabrication techniques were used to embed electroplated materials (Cu, Ni80Fe20, Co65Fe18Ni17) within bulk-micromachined and fusion-bonded silicon to form the machine structures. The induction machines were characterized in motoring mode using tethered rotors, and exhibited a maximum measured torque of 2.5 μN·m.

Published in:

Journal of Microelectromechanical Systems  (Volume:15 ,  Issue: 2 )