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The application of advanced manufacturing technology in semiconductor fabrication

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2 Author(s)
Miller, D.J. ; IBM Gen. Technol. Div., Essex Junction, VT, USA ; Fenimore, J.A.

An overview is presented of manufacturing techniques being pursued in a development line in support of advanced semiconductor production. Described are methods used to analyze alternate manufacturing techniques to provide leading-edge products in production volumes with aggressive defect reduction, process control, and turnaround time capability. Also outlined are the benefits associated with improved manufacturing techniques. Two examples are given.<>

Published in:

Electronic Manufacturing Technology Symposium, 1988, Design-to-Manufacturing Transfer Cycle. Fifth IEEE/CHMT International

Date of Conference:

10-12 Oct. 1988