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A New Multi-Site Probe Array with Monolithically Integrated Parylene Flexible Cable for Neural Prostheses

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7 Author(s)
Changlin Pang ; Caltech Micromachining Lab., California Inst. of Technol., Pasadena, CA ; Cham, J.G. ; Nenadic, Z. ; Musallam, S.
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This work presents a new multi-site probe array applied with parylene technology, used for neural prostheses to record high-level cognitive neural signals. Instead of inorganic materials (e.g. silicon dioxide, silicon nitride), the electrodes and conduction traces on probes are insulated by parylene, which is a polymer material with high electrical resistivity, mechanical flexibility, biocompatibility and easy deposition process. As a result, the probes exhibit better electrical and mechanical properties. The all dry process is demonstrated to fabricate these probe arrays with monolithically integrated parylene flexible cables using double-side-polished (DSP) wafers. With the parylene flexible cables, the probes can be easily assembled to a high density 3-D array for chronic implantation

Published in:

Engineering in Medicine and Biology Society, 2005. IEEE-EMBS 2005. 27th Annual International Conference of the

Date of Conference:

2005