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On-chip solenoid inductors for high frequency magnetic integrated circuits are proposed. The eddy current loss was reduced by dividing the inductor into three consecutive inductors connected in series. The inductor has an inductance of 1.1nH and the maximum quality factor (Qmax) of 50.5. The self-resonant frequency and the operating frequency at Qmax are greater than 17.5GHz and 16.7GHz, respectively.
Date of Publication: April 2006