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A reliable remote radio frequency (RF) powering system is developed for industrial wireless microelectromechanical systems (MEMS) strain-sensing applications. The prototype system is insensitive to mechanical rotation and produces a stable DC voltage of 2.8 V with a 2-mA current supply capability from a 50-MHz RF power source with a power conversion efficiency of 11%. An improved efficiency can be expected with an optimized power transmitter design. The CMOS power converter electronics are fabricated in a 1.5-μm CMOS process occupying an area of approximately 1 ×1 mm. The achieved DC power is adequate for supplying a high-performance wireless MEMS strain-sensing system.