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This paper presents a fully integrated readout electronics designed for a bulk micromochined capacitive gynoscope. The readout chain is composed of a charge sensitive amplifer, analog signal processing and a δσ-type A/D converter. The analog signal processing consists of a high-pass filter, a variable-gain amplifier, another high-pass filter and a low-pass filter. The system achieves a measured capacitance sensitivity of 4.00 aF (rms) in a 100 Hz band centered at 8.462kHz, consuming 2.9 mA. The signal frequency can vary between 8-10 kHz, depending on the gyroscope element. A full microelectromechanical angular velocity sensor system has been built using the readout electronics described together with external electronics, and its operation has been verified.
Instrumentation and Measurement Technology Conference, 2005. IMTC 2005. Proceedings of the IEEE (Volume:2 )
Date of Conference: 16-19 May 2005