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Readout Electronics with Bandpass Delta-Sigma A/D Converter for a Bulk Micromachined Capacitive Gyroscope

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4 Author(s)
Saukoski, M. ; Electronic Circuit Design Laboratory, Helsinki University of Technology, P.O. Box 3000, FIN-02015 HUT, Finland ; Aaltonen, L. ; Salo, T. ; Halonen, K.

This paper presents a fully integrated readout electronics designed for a bulk micromochined capacitive gynoscope. The readout chain is composed of a charge sensitive amplifer, analog signal processing and a δσ-type A/D converter. The analog signal processing consists of a high-pass filter, a variable-gain amplifier, another high-pass filter and a low-pass filter. The system achieves a measured capacitance sensitivity of 4.00 aF (rms) in a 100 Hz band centered at 8.462kHz, consuming 2.9 mA. The signal frequency can vary between 8-10 kHz, depending on the gyroscope element. A full microelectromechanical angular velocity sensor system has been built using the readout electronics described together with external electronics, and its operation has been verified.

Published in:
Instrumentation and Measurement Technology Conference, 2005. IMTC 2005. Proceedings of the IEEE  (Volume:2 )

Date of Conference: 16-19 May 2005

Page(s):
769 - 774
Print ISBN:
0-7803-8879-8
Digital Object Identifier :
10.1109/IMTC.2005.1604236
Product Type:
Conference Publications

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