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Photonic Crystal Waveguides in SOI fabricated with deep UV lithography

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5 Author(s)
Bogaerts, W. ; Dept. of Inf. Technol., Ghent Univ., Gent ; Wiaux, V. ; Taillaert, D. ; Beckx, Stephan
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We demonstrate photonic crystals for 1550 nm wavelengths fabricated with 248 nm-excimer laser deep UV lithography in silicon-on-insulator, combining high resolution with mass-manufacturing. The structures are of high quality. Measurements show transmission through waveguides and sharp bends

Published in:

Optical Communication, 2002. ECOC 2002. 28th European Conference on  (Volume:2 )

Date of Conference:

8-12 Sept. 2002

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