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Advanced controllers for microelectromechanical actuators

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3 Author(s)
Dean, R.N. ; Dept. of Electr. & Comput. Eng., Auburn, AL ; Hung, J.Y. ; Wilamowski, B.M.

We survey the recent methods for improving position control of electrostatic microelectromechanical (MEMS) actuators, and present recent new nonlinear approaches being studied in our electronic packaging and control systems laboratories. The new methods include a type of variable structure control (switching, but not sliding mode) and two methods for feedback linearizing control

Published in:
Industrial Technology, 2005. ICIT 2005. IEEE International Conference on

Date of Conference: 14-17 Dec. 2005

Page(s):
899 - 904
Print ISBN:
0-7803-9484-4
INSPEC Accession Number:
8957006
Conference Location :
Hong Kong
Digital Object Identifier :
10.1109/ICIT.2005.1600763
Product Type:
Conference Publications

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