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H/sub 2/ and NO/sub 2/ gas sensors with ZnO nanobelt layer on 36/spl deg/ LiTaO/sub 3/ and 64/spl deg/ LiNbO/sub 3/ SAW transducers

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7 Author(s)
Sadek, A.Z. ; Sch. of Electr. & Comput. Eng., RMIT Univ., Melbourne, Vic. ; Wlodarski, W. ; Kalantar-zadeh, K. ; Powell, D.A.
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Single crystal nanobelts of ZnO were synthesized and deposited onto 36deg YX LiTaO3 and 64deg YX LiNbO3 surface acoustic wave (SAW) devices for gas sensing applications. Sensor response, defined as the change in resonant frequency, was measured for H2 and NO2 between 20 and 200degC. Measured sensor responses were 3.5 kHz towards 10 ppm NO2 for a 64deg LiNbO3 SAW transducer operating at 160degC and 3 kHz towards 1% H2 for a 36deg LiTaO3 SAW transducer operating at 185degC temperature

Published in:

Sensors, 2005 IEEE

Date of Conference:

Oct. 30 2005-Nov. 3 2005