Referenced Items are not available for this document.
It is the purpose of this study to investigate the electrical properties of carbon nanotubes (CNTs) in vias prepared by microwave plasma-enhanced chemical vapor deposition (MPCVD) method.
Published in:
Microprocesses and Nanotechnology Conference, 2005 International
Date of Conference: 25-28 Oct. 2005
- Page(s):
- 174 - 175
- Print ISBN:
- 4-9902472-2-1
- INSPEC Accession Number:
- 8856480
- Digital Object Identifier :
- 10.1109/IMNC.2005.203794
- Product Type:
- Conference Publications
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