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Electrical properties of multi-walled carbon nanotubes prepared by MPCVD

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4 Author(s)
Ting, Jyh-Hua ; Nat. Nano Device Labs., Hsinchu, Taiwan ; Zhan-Liang Liu ; Cho-Lun Hsu ; Huang, Fuang-Yuan

It is the purpose of this study to investigate the electrical properties of carbon nanotubes (CNTs) in vias prepared by microwave plasma-enhanced chemical vapor deposition (MPCVD) method.

Published in:

Microprocesses and Nanotechnology Conference, 2005 International

Date of Conference:

25-28 Oct. 2005