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In situ generation and growth behavior of alpha-Fe nanocrystals by electron beam induced deposition using iron pentacarbonyl

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5 Author(s)
Zhang, W. ; High Voltage Electron Microscopy Station, Nat. Inst. for Mater. Sci., Tsukuba, Japan ; Shimojo, M. ; Takeguchi, M. ; Che, R.
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In this work, it was found that alpha-Fe nanocrystals were generated and grew around the focused electron beam irradiation points (deposited nanodots) on the substrate at room temperature during the EBID process in an ultrahigh-vacuum field emission gun scanning electron microscope (UHV-FEG-SEM), operated at 30 kV with a precursor of Fe(CO)5.

Published in:

Microprocesses and Nanotechnology Conference, 2005 International

Date of Conference:

25-28 Oct. 2005