By Topic

A simulation of backscattered electron microtomography in scanning electron microscope

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Suzuki, Y. ; Dept. of Phys. & Electron., Osaka Prefecture Univ., Japan ; Yasuda, Masaaki ; Kawata, Hiroaki ; Hirai, Yoshihiko

In this paper, we attempt to reconstruct the tomographic image from the energy-filtered BSE signals calculated with a Monte Carlo simulation of electron scattering. We discuss the characteristics of the images for several types of sampled structures.

Published in:

Microprocesses and Nanotechnology Conference, 2005 International

Date of Conference:

25-28 Oct. 2005