By Topic

Utilization of ECR mechanism of electrons heating in multipolar magnetic systems of low-pressure plasma Reactors

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Petrin, A.B. ; Theor. Dept., Russian Acad. of Sci., Moscow, Russia

In this paper, the electron-cyclotron resonance (ECR) mechanism of electrons heating by electromagnetic wave in ECR microwave low-pressure plasma reactors is considered. In such reactors, ionization is mainly provided by fast electrons trapped by multipolar magnetic system. A particle simulation is carried out for statistical ensemble of electrons in magnetic systems of different configurations with taking into account previous experimental results. The escape of fast electrons from the magnetic traps to the walls is identified as the major factor behind the loss of electrons in the limit of a collisionless plasma. A comparative evaluation of different multipolar magnetic systems is made. Basic requirements are set out concerning the optimal design of multipolar ECR plasma reactors. Several approaches for providing the efficient ECR heating of electrons are proposed.

Published in:

Plasma Science, IEEE Transactions on  (Volume:34 ,  Issue: 1 )