By Topic

LotTrack: RFID-based process control in the semiconductor industry

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
F. Thiesse ; Inst. for Technol. Manage., Univ. of St. Gallen, Switzerland ; E. Fleisch ; M. Dierkes

We describe the design and implementation of a real-time localization solution that Infineon Technologies uses in its wafer fabrication facility in Villach, Austria. The system combines active RFID, passive RFID, and ultrasound sensors to track plastic wafer boxes and wafer cassettes in the company's chip-manufacturing process.

Published in:

IEEE Pervasive Computing  (Volume:5 ,  Issue: 1 )