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Fabrication and characterization of AFM probe with crystal-quartz tuning fork structure

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9 Author(s)
Hida, H. ; Dept. of Micro-Nano Syst. Eng., Nagoya Univ., Japan ; Shikida, M. ; Fukuzawa, K. ; Ono, A.
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We have developed a new type of crystal quartz probe structure for application to the atomic force microscopy (AFM) system. Using quartz micromachining technology and a focused-ion-beam system, we fabricated a device in which we integrate tuning fork structure and a probe tip. We evaluated the vibration characteristic of the fabricated tuning fork by measuring its frequency response. From these results, we found that it would achieve subnanometer scale resolution in an AFM system.

Published in:

Micro-NanoMechatronics and Human Science, 2005 IEEE International Symposium on

Date of Conference:

7-9 Nov. 2005