Cart (Loading....) | Create Account
Close category search window
 

Retroreflecting optical modulator using an MEMS deformable micromirror array

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Chan, T.K. ; Dept. of Electr. & Comput. Eng., Univ. of California, San Diego, CA, USA ; Ford, J.E.

A modulating corner-cube reflector with one microelectromechanical-system (MEMS) mirror that deforms from a flat into a hexagonal array of concave reflective microlenses to disperse the retroreflected wavefront is demonstrated. It is shown that such retromodulators can operate under a wide range of wavelength and angle illumination using Huygens-Fresnel propagation analysis, and this analysis is verified using devices fabricated by surface micromachining. A gold-coated silicon-nitride membrane suspended over 1-mm-diameter circular cavities had a resonant frequency of 160 kHz and 0.55-μm maximum deformation with 79 V applied. While this deflection was only 2/3 of the design value of 0.8 μm, we measured an up to 7:1 modulation contrast ratio from a prototype retromodulator, which achieved 100-kHz modulation over a 100-nm optical bandwidth, a 35° range of incident angles, and temperatures ranging from 20 to 100°C.

Published in:

Lightwave Technology, Journal of  (Volume:24 ,  Issue: 1 )

Date of Publication:

Jan. 2006

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.