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A new method for the extraction of the small-signal model parameters of InP-based heterojunction bipolar transistors (HBT) is proposed. The approach is based on the combination of the analytical and optimization technology. The initial values of the parasitic pad capacitances are extracted by using a set of closed-form expressions derived from cutoff mode S-parameters without any test structure, and the intrinsic elements determined by using the analytical method are described as functions of the parasitic elements. An advanced design system is then used to optimize only the parasitic parameters with very small dispersion of initial values. Good agreement is obtained between simulated and measured results for an InP HBT with 5×5 μm2 emitter area over a wide range of bias points up to 40 GHz.