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Projection pursuit for analyzing data from semiconductor environments

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3 Author(s)
Rohatsch, T. ; Infineon Technol. AG, Regensburg, Germany ; Poppel, G. ; Werner, H.

Complex environments with complex productions lead to complex data; this certainly applies to the work on semiconductors. Acquiring the data offers a challenge, and the challenge only grows when attempting to analyze the data structures and dependencies. We put forward the well-known Projection Pursuit method; it has apparently not yet been used so far in the production of semiconductors. Extensions of this method are introduced which include robust index functions, new optimizing strategies, and an approach to analyzing the dependencies between different groups of variables.

Published in:

Semiconductor Manufacturing, IEEE Transactions on  (Volume:19 ,  Issue: 1 )