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Surface acoustic wave velocity in single-crystal AlN substrates

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6 Author(s)
Bu, G. ; Dept. of Electr., Comput., & Syst. Eng., Rensselaer Polytech. Inst., Troy, NY, USA ; Ciplys, D. ; Shur, M. ; Schowalter, L.J.
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The surface acoustic wave velocity has been measured on a-plane (c-propagation) and c-plane oriented bulk aluminum nitride (AlN) single crystals using the S/sub 11/-parameter method in the frequency range 160-360 MHz. The SAW velocity is 5760 m/s for both orientations. From comparison of this value with the simulations using various elastic constants of AlN available in literature, we estimated the elastic constant C/sub 44/ to be 122 /spl plusmn/ 1 GPa.

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Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:53 ,  Issue: 1 )