Referenced Items are not available for this document.
This paper presents a novel, large-deflection piezoelectric folded cantilever microactuator (PFCM). A multimorph model for the large-deflection PFCM is derived, in which unified formulas for deflection angle and vertical displacement of N-level PFCM are obtained. Based on the model, multilayer PFCMs using PZT film are designed and optimized. The large-deflection PFCM is extensively applicable to microdevices or microsystem applications such as micro-optical switches, microelectromechanical systems (MEMS) scanners, and so forth.
Published in:
Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on
(Volume:53
,
Issue:
1
)
Date of Publication: Jan. 2006
- Page(s):
- 237 - 240
- ISSN :
- 0885-3010
- INSPEC Accession Number:
- 8769934
- Digital Object Identifier :
- 10.1109/TUFFC.2006.1588409
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 February 2006
- Issue Date :
- Jan. 2006
- Sponsored by :
- IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society
- PubMed ID :
- 16471450
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