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Theoretical analysis of micro-machined ultrasonic transducer using a simple 1-D model

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3 Author(s)
Ballandras, S.J. ; Dept. LPMO, UMR CNRS, Besancon, France ; Wilm, Mikael ; Gelly, J.-F.

Micro-machined ultrasonic transducers (MUT) appear as an attractive alternative to standard bulk transducers mainly based on PZT ceramic actuators. However, the simulation of these new devices requires one to take correctly into account their operating conditions. Particularly, most of the MUT structures are periodic, associating a very large number of elementary actuators excited in phase. Furthermore, the development of an equivalent to the Mason model for MUTs would help in the promotion of this new kind of transducers. In this work, we propose a very simple model based on the material resistance theory to describe the flexural motion of a MUT. It is associated with a periodic Green's function development to take into account radiation in water. Basic working principles of MUT then are deduced from computing results, which coincides with already published data on that topic.

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Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:53 ,  Issue: 1 )