Cart (Loading....) | Create Account
Close category search window
 

Threshold voltage and C-V characteristics of SOI MOSFET's related to Si film thickness variation on SIMOX wafers

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Jian Chen ; Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA ; Solomon, R. ; Chan, T.-Y. ; Ko, P.K.
more authors

C-V characteristics of fully depleted SOI MOSFETs have been studied using a technique for measuring silicon-film thickness using a MOSFET. The technique is based on C-V measurements between the gate and source/drain at two different back-gate voltages, and only a large-area transistor is required. Using this technique, SOI film thickness mapping was made on a finished SIMOX wafer and a thickness variation of ±150 Å was found. This thickness variation causes as much as a 100-mV variation in the device threshold voltage. The silicon-film thickness variation and threshold-voltage variation across a wafer shows a linear correlation dependence for a fully depleted device. C-V measurements of the back-gate device yield the buried-oxide thickness and parasitic capacitances. The effects of GIDL (gate-induced drain leakage) current on C-V characteristics are also discussed

Published in:

Electron Devices, IEEE Transactions on  (Volume:39 ,  Issue: 10 )

Date of Publication:

Oct 1992

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.