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Liquid metal droplets for RF MEMS switches

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2 Author(s)
Chung-Hao Chen ; Sch. of Electr. & Comput. Eng., Purdue Univ., West Lafayette, IN, USA ; Peroulis, D.

This paper discusses the design, fabrication and characterization of microstructures for the manipulation of very small liquid-metal droplets. In particular we demonstrate the successful actuation of 50-μm liquid-metal droplets with an actuation voltage of less than 70V. Liquid contacts have the potential of increased power handling, which renders these structures good candidates for reliable high-power MEMS switches.

Published in:

Silicon Monolithic Integrated Circuits in RF Systems, 2006. Digest of Papers. 2006 Topical Meeting on

Date of Conference:

18-20 Jan. 2006