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A new method to enhance mobility of poly-Si TFT recrystallized by excimer laser annealing

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5 Author(s)
Kuriyama, H. ; Sanyo Electr. Co. Ltd., Osaka ; Kiyama, S. ; Kuwahara, T. ; Noguchi, S.
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Summary form only given. A SEM study after dry etching was conducted for poly-Si films recrystallized by excimer laser annealing. It was found that the grain size could be enlarged to about 300 nm using the low-temperature (400°C) substrate heating method. The authors propose a low-temperature (<600°C) substrate heating method during excimer laser annealing with a structure composed of a-Si(1000 Å)/SiO2/glass, which has been adopted to reduce thermal damage. By numerical simulation and experimental investigation, the authors demonstrated that it is possible to realize enlargement of the grain size and enhancement to a high field effect mobility of 147 cm2/V-s without thermal damage to the glass substrate using the method

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Electron Devices, IEEE Transactions on  (Volume:38 ,  Issue: 12 )