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Novel on-chip fully monolithic integration of GaAs devices with completely fabricated Si CMOS circuits

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4 Author(s)
Kai Ma ; Solid State & Photonics Lab., Stanford Univ., CA, USA ; R. Chen ; D. A. B. Miller ; J. S. Harris

We monolithically integrated polycrystalline GaAs metal-semiconductor-metal (MSM) photoconductive switches with a completely fabricated Si-CMOS amplifier and obtained a properly functional optical receiver, without altering the Si circuit performance. To our knowledge, this is the first time a fully monolithic on-chip integration has been achieved.

Published in:

IEEE Journal of Selected Topics in Quantum Electronics  (Volume:11 ,  Issue: 6 )