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Novel on-chip fully monolithic integration of GaAs devices with completely fabricated Si CMOS circuits

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4 Author(s)
Ma, Kai ; Solid State & Photonics Lab., Stanford Univ., CA, USA ; Chen, R. ; Miller, D.A.B. ; Harris, James S.

We monolithically integrated polycrystalline GaAs metal-semiconductor-metal (MSM) photoconductive switches with a completely fabricated Si-CMOS amplifier and obtained a properly functional optical receiver, without altering the Si circuit performance. To our knowledge, this is the first time a fully monolithic on-chip integration has been achieved.

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Selected Topics in Quantum Electronics, IEEE Journal of  (Volume:11 ,  Issue: 6 )