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Integrated thermal-fluidic I/O interconnects for an on-chip microchannel heat sink

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3 Author(s)
Dang, B. ; Microelectron. Res. Center, Georgia Inst. of Technol., Atlanta, GA, USA ; Bakir, M.S. ; Meindl, J.D.

Power dissipation in microprocessors will reach a level that necessitates chip-level liquid cooling in the near future. An on-chip microfluidic heat sink can reduce the thermal interfaces between an IC chip and the convective cooling medium. Through wafer-level processing, integrated thermal-fluidic I/O interconnects enable on-chip microfluidic heat sinks with ultrasmall form factor at low-cost. This letter describes wafer-level integration of microchannels at the wafer back-side with through-wafer fluidic paths and thermal-fluidic input/output interconnection for future generation gigascale integrated chips.

Published in:

Electron Device Letters, IEEE  (Volume:27 ,  Issue: 2 )