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Temperature stable Hall effect sensors

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5 Author(s)
Partin, D.L. ; Delphi Res. Labs., Shelby Township, MI, USA ; Heremans, Joseph P. ; Schroeder, T. ; Thrush, C.M.
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Magnetic field sensors are needed for high-accuracy position, angle, force, strain, torque, and current flow measurements. Molecular beam epitaxy was used to grow tellurium-doped indium-gallium antimonide thin films. Hall effect sensors made from these films have been studied for their magnetic sensitivity and thermal stability. For a range of alloy composition near In0.8Ga0.2Sb and n-type doping levels near 2×1017 cm-3, high magnetic sensitivity from -40°C to +200°C was found with a resolution of better than ±0.5% over the entire temperature range.

Published in:

Sensors Journal, IEEE  (Volume:6 ,  Issue: 1 )