Extremely thin, single-crystal films of LiNbO/sub 3/ fabricated using localized He+ ion-implantation

We demonstrate that extremely thin, i.e., /spl sim/2-3/spl mu/m, single-crystal films of LiNbO/sub 3/ can be formed on a wafer using patterned ion-implantation followed by chemical etching. Control of the membrane thickness and its waveguiding properties are demonstrated.