A sensor using sinusoidal phase-modulation of 1.5MHz generated by modulating the injection current of a laser diode measures a phase of the interference signal with a measuring time of 0.25μs and an error less than 20nm in displacement.
Published in:
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Date of Conference: 30-02 Aug. 2005