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This paper presents the design and the fabrication process for a spatial optical modulator based on curvature modulation using a continuous reflective surface with the voltage induced deformation. The device consists of an interdigitated bottom electrode, a compliant silicone layer (PDMS), and a top electrode. A coupled opto-electro-mechanical simulation was carried out to determine the optimum geometry. As PDMS is not a photo-definable polymer, we used a photoresist mold to obtain the device.
Date of Conference: 12-17 June 2005