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Silicone polymer based optical modulator - design and fabrication process

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4 Author(s)
Cristea, D. ; Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest, Romania ; Obreja, P. ; Kusko, M. ; Moagar-Poladian, V.

This paper presents the design and the fabrication process for a spatial optical modulator based on curvature modulation using a continuous reflective surface with the voltage induced deformation. The device consists of an interdigitated bottom electrode, a compliant silicone layer (PDMS), and a top electrode. A coupled opto-electro-mechanical simulation was carried out to determine the optimum geometry. As PDMS is not a photo-definable polymer, we used a photoresist mold to obtain the device.

Published in:

Lasers and Electro-Optics Europe, 2005. CLEO/Europe. 2005 Conference on

Date of Conference:

12-17 June 2005

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