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Neural network based modeling for the growth rate of ZnO thin films on the pulsed laser deposition

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6 Author(s)
Young-Don Ko ; Dept. of Electr. & Electron. Eng., Yonsei Univ., Seoul, South Korea ; Kang, Hong Seong ; Jeong, Min-Chang ; Lee, Sang Yeol
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In this study the D-optimal design was used to make design matrix in this experiment. Neural networks (NNets) based on the backpropagation (BP) algorithm are applied to the pulsed laser deposition (PLD) process modeling in order to construct the model for the growth rate of the ZnO thin films.

Published in:

Future of Electron Devices, 2004. International Meeting for

Date of Conference:

26-28 July 2004