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In this paper, we propose temperature independent AWG using silicon-on-insulator (SOI). Since the length of each waveguide is equal and the second star coupler consists of the hollow slab, the temperature dependence can be eliminated. Wavelength-multiplexed light is divided by the first diffraction order in the output slab region. We fabricated the AWG composed of equal-length waveguides on SOI substrates and the demultiplexing characteristic was measured.