This work deals with the electrical characterization down to 4K of fully depleted SOI MOSFET with a physical gate length down to 10nm. Temperature measurements are used to highlight source to drain tunneling: which is evidenced at room temperature for the first time. Finally resonant tunneling effect is observed.
Published in:
SOI Conference, 2005. Proceedings. 2005 IEEE International
Date of Conference: 3-6 Oct. 2005