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Application of Taguchi robust design method to SAW mass sensing device

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2 Author(s)
Der Ho Wu ; Dept. of Mech. Eng., Nat. Pingtung Univ. of Sci. & Technol., Taiwan ; Hsin Hua Chen

It is essential that measurement systems provide an accurate and robust performance over a wide range of input conditions. This paper adopts Taguchi's signal-to-noise ratio (SNR) analysis to develop a robust design for the Rayleigh surface acoustic wave (SAW) gas sensing device operated in a conventional delay-line configuration. The goal of the present Taguchi design activity is to increase the sensitivity of this sensor while simultaneously reducing its variability. A time- and cost-efficient finite-element analysis method is used to investigate the effects on the sensor's response output of variations in the carbon dioxide (CO/sub 2/) gas deposited mass. The simulation results for the resonant frequency and wave mode analysis are all shown to be in good agreement with the values predicted theoretically.

Published in:

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:52 ,  Issue: 12 )

Date of Publication:

Dec. 2005

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