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Phase noise in capacitively coupled micromechanical oscillators

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3 Author(s)
V. Kaajakari ; VTT Inf. Technol., VTT Tech. Res. Centre of Finland, Espoo, Finland ; J. K. Koskinen ; T. Mattila

Phase noise in capacitively coupled micro-resonator-based oscillators is investigated. A detailed analysis of noise mixing mechanisms in the resonator is presented, and the capacitive transduction is shown to be the dominant mechanism for low-frequency 1/f-noise mixing into the carrier sidebands. Thus, the capacitively coupled micromechanical resonators are expected to be more prone to the 1/f-noise aliasing than piezoelectrically coupled resonators. The analytical work is complemented with simulations, and a highly efficient and accurate simulation method for a quantitative noise analysis in closed-loop oscillator applications is presented. Measured phase noise for a microresonator-based oscillator is found to agree with the developed analytical and simulated noise models.

Published in:

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control  (Volume:52 ,  Issue: 12 )