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Sophistication and complexity of technology CAD (TCAD) tools have greatly been increased in the last two decades. Data files were used to integrate existing tools, which do not provide the benefits of code-reuse. To solve date files problems an object-oriented client-server approach stemmed during the last decade. Semiconductor wafer representation (SWR) is a standard OO model. In this paper an information model based on SWR is proposed. Geometry and grid servers are defined and implemented. A modified adaptive refinement algorithm using the quadtree structure is used to generate a boundary-conformal mesh.