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In this or we present the design of the first MEMS based tunable optical filter that satisfies a 20dB to 3dB bandwidth ratio of only 3. The design is based on the coupled cavity approach and its tuning is achieved using electrostatic actuation. The electro mechanical simulation using the finite element method (FEM) shows a settling time in the order of tens of microseconds.
Circuits and Systems, 2003 IEEE 46th Midwest Symposium on (Volume:2 )
Date of Conference: 27-30 Dec. 2003