By Topic

A MEMS-based coupled-cavity tunable optical filter

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)

In this or we present the design of the first MEMS based tunable optical filter that satisfies a 20dB to 3dB bandwidth ratio of only 3. The design is based on the coupled cavity approach and its tuning is achieved using electrostatic actuation. The electro mechanical simulation using the finite element method (FEM) shows a settling time in the order of tens of microseconds.

Published in:

Circuits and Systems, 2003 IEEE 46th Midwest Symposium on  (Volume:2 )

Date of Conference:

27-30 Dec. 2003