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Surface studies and electrical tests of porous-silicon SnO2 gas-sensors

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4 Author(s)
Dima, O. ; Dept. of Phys., Wuppertal Univ., Germany ; Becks, K.-H. ; Dima, A. ; Moldovan, C.

Electrical tests of porous/silicon SnO2 gas sensors show the advantage of the porous substrate on sensor sensitivity and working temperature. Surface studies, especially related to the metallisation process, reveal technological problems and possible directions of action that foster the integration of this highly promising platform with other technologies (particularly metallisation/interconnectivity technologies, such as Multi-Chip Module ∼ Deposited, MCM-D).

Published in:

Semiconductor Conference, 2005. CAS 2005 Proceedings. 2005 International  (Volume:1 )

Date of Conference:

3-5 Oct. 2005

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