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Microfluidic dynamic system for biological fluids viscosity measurements

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5 Author(s)
Avram, M. ; National Inst. for Res. & Dev. in Microtechnologies, Bucharest, Romania ; Avram, A. ; Iliescu, C. ; Manea, E.
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The purpose of this research was to model, design and fabricate a microdynamic system, using a four masks silicon micromachining process and sacrificial layers technique. The measurement principle is the detection of the rotation of a micromachining polysilicon gear wheels system with external diameters of 250 μm, 200 μm, 160 μm and 3 μm thickness combine the undercut and refill technique with pin-joint bearing permitting the fabrication of bushings that can be used, for example, to elevate the rotor away from the silicon surface. The microfluidic dynamic system consists of a gear wheels system, an electromagnetic micropump and a magnetic controller. Each device is fabricated by silicon micromachining technology and tested to obtain the specific characteristics.

Published in:

Semiconductor Conference, 2005. CAS 2005 Proceedings. 2005 International  (Volume:1 )

Date of Conference:

3-5 Oct. 2005